화학공학소재연구정보센터
Journal of Physical Chemistry A, Vol.102, No.31, 6282-6291, 1998
Diagnostics and kinetic modeling of a hollow cathode N2O discharge
The present work describes a systematic experimental investigation of a N2O hollow cathode discharge. The local electron mean energy and density have been determined with a double Langmuir probe. Fourier transform infrared spectroscopy and mass spectrometry have been employed for the measurement of the concentration of the stable species present in the discharge. N2O, N-2, O-2, and NO are always identified as the main constituents of the discharge plasma. In addition, NO2 is found for the first time in a glow discharge of nitrous oxide. As a plausible explanation, a reaction of NO with oxygen atoms adsorbed on the cathode walls is proposed, although homogeneous reactions of vibrationally excited species cannot be discarded. A model based on a reduced set of kinetic equations including electron dissociation, gas-phase reactions, and gas-surface processes can give a global account of the measured data for all the experimental conditions used. The results are discussed and, when possible, compared to previous works on other types of N2O glow discharges.