Electrohydrodynamic (EHD) and thermocapillary (TC) forces are used to destabilize the interface of ultrathin liquid films and create sub-micrometer-sized features. EHD instabilities result from the normal component of Maxwell stress, while TC forces induce shear stress to the interface. In this study, the accuracy of linear stability (LS) analysis for the prediction of final structures which undergo nonlinear stages during pattern evolution is investigated by using new normalizing factors. The reasons for the deviation between LS analysis and nonlinear simulation results are then discussed. It is found that, despite the positive effect of TC in reducing the structure sizes compared to the EHD case, it causes lateral movement of pillars, which results in faster coarsening in later stages of pattern formation. To control the movement of patterns and create well-ordered features, nonuniform electrostatic and TC-induced instabilities of the film are examined by using ridge and square-block-shaped electrodes.