We present results from the anodization of single crystal Al(100) and Al(111) surfaces and the aluminum alloy AA 6063 studied in situ by X-ray reflectivity and electrochemical impedance spectroscopy. We observe that the anodic oxide layer grows linearly with the anodization potential and that the thicknesses are similar for all samples. However, the thicknesses obtained from X-ray reflectivity are higher than that obtained from electrochemical impedance spectroscopy. We attribute the higher thicknesses to an outer porous oxide layer, which is not detected by electrochemical impedance spectroscopy. Both, electrochemical impedance spectroscopy and X-ray reflectivity suggests that a more heterogeneous and rough oxide is formed on AA 6063 due to the influence of the alloying elements and intermetallic particles during the growth.