We report on the generation of surface attached polymer networks through C,H insertion reactions based on carbene intermediates. To this copolymers based on N,N-dimethyl acrylamide, which contain -diazo ester groups, are generated and coated onto a solid substrate covered with a self-assembled monolayer of a silane. After deposition, films having thicknesses of approximately 120 nm are irradiated with UV light having a wavelength of 254 nm or 360 nm or heated to temperatures between 80 and 180 degrees C. During the light or heat-induced activation process, carbenes are formed, which react via CH insertion with any neighboring polymer chain and/or with the self-assembled monolayer on the substrate, thus forming surface-attached polymer networks. To follow the kinetics of the crosslinking process, the conditions are adjusted, so that they range between 5 and 10 min for the UV-crosslinking and 5 to 15 min for the heat-induced crosslinking. UV-patterning of the surface-attached polymer networks through chrome contact masks allows generation of microstructures in the micrometer range. We investigate the layer formation process and describe the formation of microstructured surfaces based on these surface-attached polymer networks. (c) 2017 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2017, 55, 3276-3285