We fabricated thick films of cubic garnet solid electrolyte AlyLi7-3y-zLa3Zr2-zTazO12 (ALLZTO) by the Aerosol Deposition Method (ADM). Due to the room temperature impact consolidation (RTIC) mechanism, the films become dense. A thermal post-treatment of the film revealed the morphological and process-related impact on the ionic conductivity. As-deposited films show a reduced conductivity around 2.10(-7) S/cm. Using electrochemical impedance spectroscopy and high-temperature X-ray diffraction, we found the lattice distortion and nano-crystallinity of the films to be the decisive effect for the conductivity reduction. In our case, post-deposition annealing at 400 degrees C lead to an increase of the ionic conductivity to 2.10(-5) S/cm. With a beginning of sintering at 600 degrees C, the conductivity successively increased further, reaching values of 7.10(-5) S/cm. (C) 2017 Elsevier B.V. All rights reserved.