The dependences of magneto-optical, structural and morphological properties of reactive ion beam sputtered (RIBS) nanoscale (Bi,Ga)-substituted DyIG [(Bi,Ga:DyIG)] films on (111) GGG and (111) CMZGGG substrates on the time of crystallization annealing were studied using Faraday effect measurements, Xray diffraction and scanning atomic force microscopy. It was found that the roughness, degree of crystallinity and Faraday rotation angle of the films depend substantially on the substrate type and the time of crystallization annealing. It was determined a minimal time to achieve the optimal ratio between the measured magneto-optical and structural parameters of the film. (C) 2017 Elsevier Ltd. All rights reserved.