화학공학소재연구정보센터
Solid-State Electronics, Vol.136, 43-50, 2017
Temporal and voltage stress stability of high performance indium-zinc-oxide thin film transistors
Thin film transistors (TFTs) based on transparent oxide semiconductors, such as indium zinc oxide (IZO), are of interest due to their improved characteristics compared to traditional a-Si TFTs. Previously, we reported on top-gated IZO TFTs with an in-situ formed HfO2 gate insulator and IZO active channel, showing high performance: on/off ratio of similar to 10(7), threshold voltage V-T near zero, extracted low-field mobility mu(0) = 95 cm(2)/V.s, and near-perfect subthreshold slope at 62 mV/decade. Since device stability is essential for technological applications, in this paper we report on the temporal and voltage stress stability of IZO TFTs. Our devices exhibit a small negative V-T shift as they age, consistent with an increasing carrier density resulting from an increasing oxygen vacancy concentration in the channel. Under gate bias stress, freshly annealed TFTs show a negative V-T shift during negative V-G gate bias stress, while aged (>1 week) TFTs show a positive V-T shift during negative V-G stress. This indicates two competing mechanisms, which we identify as the field-enhanced generation of oxygen vacancies and the field-assisted migration of oxygen vacancies, respectively. A simplified kinetic model of the vacancy concentration evolution in the IZO channel under electrical stress is provided. (C) 2017 Elsevier Ltd. All rights reserved.