Dynamic Scaling studies have been performed here to investigate the morphological surface evolution of single crystal TiO2(110) surfaces after they are implanted with Cobalt ions. These ion irradiated surfaces develop via non-equilibrium growth processes and display rough interfaces with height fluctuations that demonstrate self-affine behavior. The scaling exponents like Roughness exponent (alpha), Growth Exponent (beta), dynamic exponent (z) and structure factor constant (gamma) have been derived here by applying height-height correlation as well as structure factor analysis techniques and show that diffusion plays a pivotal role in the evolution of these self-affine surfaces created after Cobalt ion irradiation. (C) 2017 Elsevier B.V. All rights reserved.