Effective direct writing of hierarchical 3D polymer micromeshes by continuous out-of-plane longitudinal scanning

Cheol Woo Ha; Prem Prabhakaran; Yong Son; Kwang-Sup Lee; Dong-Yol Yang

Macromolecular Research, Vol.25, No.11, 1129-1134, November, 2017

DOI10.1007/s13233-017-5144-3 Export Citation

Effective direct writing of hierarchical 3D polymer micromeshes by continuous out-of-plane longitudinal scanning

Cheol Woo Ha, Prem Prabhakaran¹, Yong Son², Kwang-Sup Lee^{1, †}, and Dong-Yol Yang^†

School of Mechanical Engineering and Aerospace System, Korea Advanced Institute of Science and Technology, Daejeon 34141, Korea
¹Department of Advanced Materials and Chemical Engineering, Hannam University, Daejeon 34054, Korea
²Micro/Nano Scale Manufacturing R&D Group, Korea Institute of Industrial Technology, Ansan, Gyeonggi 17394, Korea

E-mail:,

Nano-stereolithography, also known as two-photon direct writing is widely used for fabrication of the three-dimensional microstructure with submicron resolution. Heirarchical three-dimensional meshed microstructures are crucial for microelectromechanical systems (MEMS), photonics and biotechnological applications. Routine study for various applications using such structures requires fabrication of many sets of structures. Conventionally such meshed microstructures are constructed through layer-by-layer accumulation with discrete point-to-point laser scanning. This technique is time consuming, leading to long fabrication times placing constraints on practical applications as well as optimization of structures. In this work we propose continuous longitudinal laser scanning method as an effective means for direct writing of hierarchical three-dimensional meshed microstructures. The advantages of continuously longitudinal laser scanning method are explored for its time economy and fabrication effectiveness; a fabrication window is suggested to determine the fabrication parameter easily according to laser power and structural design.

Keywords:two-photon polymerization;three-dimensional microstructure;polymer microstructures;two-photon lithography;nonlinear optics

[References]

Wu ES, Strickler JH, Harrell WR, Webb WW, in Optical/Laser Microlithography V, International Society for Optics and Photonics 1992, pp 776?782.
Spangenberg A, Hobeika N, Stehlin F, Malval JP, Wieder F, Prabhakaran P, Baldeck P, Soppera O, Updates in Advanced Lithography, 35 (2013).
Lee KS, Kim RH, Yang DY, Park SH, Prog. Polym. Sci, 33, 631 (2008)
Stellacci F, Bauer CA, Meyer-Friedrichsen T, Wenseleers W, Alain V, Kuebler SM, Pond SJK, Zhang YD, Marder SR, Perry JW, Adv. Mater., 14(3), 194 (2002)
Yang DY, Park SH, Lim YW, Kong HJ, Yi SW, Yang HK, Lee KS, Appl. Phys. Lett., 90, 079903 (2007)
Lim TW, Son Y, Yang DY, Kong HJ, Lee KS, Park SH, Appl. Phys. A-Mater. Sci. Process., 92, 541 (2008)
Park SH, Lim TW, Yang DY, Cho NC, Lee KS, Appl. Phys. Lett., 89, 173133 (2006)
Maruo S, Nakamura O, Kawata S, Opt. Lett., 22, 132 (1997)
Kawata S, Sun HB, Tanaka T, Takada K, Nature, 412, 697 (2001)
Haske W, Chen VW, Hales JM, Dong W, Barlow S, Marder SR, Perry JW, Opt. Express, 15, 3426 (2007)
Emons M, Obata K, Binhammer T, Ovsianikov A, Chichkov BN, Morgner U, Opt. Mater. Express, 2, 942 (2012)
Park SH, Lim TW, Yang DY, Kong HJ, Kim JY, Lee KS, Macromol. Res., 14(2), 245 (2006)
Park SH, Lim TW, Yang DY, Kim RH, Lee KS, Macromol. Res., 14(5), 559 (2006)
Sun HB, Matsuo S, Misawa H, Appl. Phys. Lett., 74, 786 (1999)
Cumpston BH, Ananthavel SP, Barlow S, Dyer DL, Ehrlich JE, Erskine LL, Heikal AA, Kuebler SM, Lee IYS, McCord-Maughon D, Qin JQ, Rockel H, Rumi M, Wu XL, Marder SR, Perry JW, Nature, 398(6722), 51 (1999)
Farsari M, Chichkov BN, Nat Photon, 3, 450 (2009)
Straub M, Gu M, Opt. Lett., 27, 1824 (2002)
Serbin J, Ovsianikov A, Chichkov B, Opt. Express, 12, 5221 (2004)
Lin CL, Lee YH, Lin CT, Liu YJ, Hwang JL, Chung TT, Baldeck PL, Opt. Express, 19, 20604 (2011)
Jeong YJ, Lim TW, Son Y, Yang DY, Kong HJ, Lee KS, Opt. Express, 18, 13745 (2010)
Maruo S, Saeki T, Kanazawa Y, Ichiyanagi Y, in Micro-Nano-Mechatronics and Human Science, 2008. MHS 2008. International Symposium on, IEEE2008, pp 291?294.
Anscombe N, Nat Photon, 4, 22 (2010)
Ovsianikov A, Schlie S, Ngezahayo A, Haverich A, Chichkov BN, J. Tissue. Eng. Regen. Med., 1, 443 (2007)
Claeyssens F, Hasan EA, Gaidukeviciute A, Achilleos DS, Ranella A, Reinhardt C, Ovsianikov A, Xiao S, Fotakis C, Vamvakaki M, Chichkov BN, Farsari M, Langmuir, 25(5), 3219 (2009)
Ovsianikov A, Malinauskas M, Schlie S, Chichkov B, Gittard S, Narayan R, Lobler M, Sternberg K, Schmitz KP, Haverich A, Acta Biomaterialia, 7, 967 (2011)
Medina-Sanchez M, Schwarz L, Meyer AK, Hebenstreit F, Schmidt OG, Nano Lett., 16, 555 (2016)
Krini R, Ha CW, Prabhakaran P, El Mard H, Yang DY, Zentel R, Lee KS, Macromol. Rapid Commun., 36(11), 1108 (2015)
Lee KJ, An JH, Ha CW, Son Y, Yang DY, Jung J, Lee KS, Choi JW, J. Biomed. Nanotechnol., 12, 2125 (2016)
Park J, in “Two-Photon Active Functional Materials for Biomedical Applications” Hannam University, Ph.D. Thesis (2015).
Teh W, Durig U, Drechsler U, Smith C, Guntherodt HJ, J. Appl. Phys., 97, 054907 (2005)
Teh W, Durig U, Salis G, Harbers R, Drechsler U, Mahrt R, Smith C, Guntherodt HJ, Appl. Phys. Lett., 84, 4095 (2004)

[1] Wu ES, Strickler JH, Harrell WR, Webb WW, in Optical/Laser Microlithography V, International Society for Optics and Photonics 1992, pp 776?782.

[2] Spangenberg A, Hobeika N, Stehlin F, Malval JP, Wieder F, Prabhakaran P, Baldeck P, Soppera O, Updates in Advanced Lithography, 35 (2013).

[3] Lee KS, Kim RH, Yang DY, Park SH, Prog. Polym. Sci, 33, 631 (2008)

[4] Stellacci F, Bauer CA, Meyer-Friedrichsen T, Wenseleers W, Alain V, Kuebler SM, Pond SJK, Zhang YD, Marder SR, Perry JW, Adv. Mater., 14(3), 194 (2002)

[5] Yang DY, Park SH, Lim YW, Kong HJ, Yi SW, Yang HK, Lee KS, Appl. Phys. Lett., 90, 079903 (2007)

[6] Lim TW, Son Y, Yang DY, Kong HJ, Lee KS, Park SH, Appl. Phys. A-Mater. Sci. Process., 92, 541 (2008)

[7] Park SH, Lim TW, Yang DY, Cho NC, Lee KS, Appl. Phys. Lett., 89, 173133 (2006)

[8] Maruo S, Nakamura O, Kawata S, Opt. Lett., 22, 132 (1997)

[9] Kawata S, Sun HB, Tanaka T, Takada K, Nature, 412, 697 (2001)

[10] Haske W, Chen VW, Hales JM, Dong W, Barlow S, Marder SR, Perry JW, Opt. Express, 15, 3426 (2007)

[11] Emons M, Obata K, Binhammer T, Ovsianikov A, Chichkov BN, Morgner U, Opt. Mater. Express, 2, 942 (2012)

[12] Park SH, Lim TW, Yang DY, Kong HJ, Kim JY, Lee KS, Macromol. Res., 14(2), 245 (2006)

[13] Park SH, Lim TW, Yang DY, Kim RH, Lee KS, Macromol. Res., 14(5), 559 (2006)

[14] Sun HB, Matsuo S, Misawa H, Appl. Phys. Lett., 74, 786 (1999)

[15] Cumpston BH, Ananthavel SP, Barlow S, Dyer DL, Ehrlich JE, Erskine LL, Heikal AA, Kuebler SM, Lee IYS, McCord-Maughon D, Qin JQ, Rockel H, Rumi M, Wu XL, Marder SR, Perry JW, Nature, 398(6722), 51 (1999)

[16] Farsari M, Chichkov BN, Nat Photon, 3, 450 (2009)

[17] Straub M, Gu M, Opt. Lett., 27, 1824 (2002)

[18] Serbin J, Ovsianikov A, Chichkov B, Opt. Express, 12, 5221 (2004)

[19] Lin CL, Lee YH, Lin CT, Liu YJ, Hwang JL, Chung TT, Baldeck PL, Opt. Express, 19, 20604 (2011)

[20] Jeong YJ, Lim TW, Son Y, Yang DY, Kong HJ, Lee KS, Opt. Express, 18, 13745 (2010)

[21] Maruo S, Saeki T, Kanazawa Y, Ichiyanagi Y, in Micro-Nano-Mechatronics and Human Science, 2008. MHS 2008. International Symposium on, IEEE2008, pp 291?294.

[22] Anscombe N, Nat Photon, 4, 22 (2010)

[23] Ovsianikov A, Schlie S, Ngezahayo A, Haverich A, Chichkov BN, J. Tissue. Eng. Regen. Med., 1, 443 (2007)

[24] Claeyssens F, Hasan EA, Gaidukeviciute A, Achilleos DS, Ranella A, Reinhardt C, Ovsianikov A, Xiao S, Fotakis C, Vamvakaki M, Chichkov BN, Farsari M, Langmuir, 25(5), 3219 (2009)

[25] Ovsianikov A, Malinauskas M, Schlie S, Chichkov B, Gittard S, Narayan R, Lobler M, Sternberg K, Schmitz KP, Haverich A, Acta Biomaterialia, 7, 967 (2011)

[26] Medina-Sanchez M, Schwarz L, Meyer AK, Hebenstreit F, Schmidt OG, Nano Lett., 16, 555 (2016)

[27] Krini R, Ha CW, Prabhakaran P, El Mard H, Yang DY, Zentel R, Lee KS, Macromol. Rapid Commun., 36(11), 1108 (2015)

[28] Lee KJ, An JH, Ha CW, Son Y, Yang DY, Jung J, Lee KS, Choi JW, J. Biomed. Nanotechnol., 12, 2125 (2016)

[29] Park J, in “Two-Photon Active Functional Materials for Biomedical Applications” Hannam University, Ph.D. Thesis (2015).

[30] Teh W, Durig U, Drechsler U, Smith C, Guntherodt HJ, J. Appl. Phys., 97, 054907 (2005)

[31] Teh W, Durig U, Salis G, Harbers R, Drechsler U, Mahrt R, Smith C, Guntherodt HJ, Appl. Phys. Lett., 84, 4095 (2004)