Characterization of Highly Conducting ZnMgBeGaO/Ag/ZnMgBeGaO Transparent Conductive Multilayer Films with UV Energy Bandgap

Ngoc Minh Le; Ba Cuong Hoang; Byung-Teak Lee

Korean Journal of Materials Research, Vol.27, No.12, 695-698, December, 2017

DOI10.3740/MRSK.2017.27.12.695 Export Citation

Characterization of Highly Conducting ZnMgBeGaO/Ag/ZnMgBeGaO Transparent Conductive Multilayer Films with UV Energy Bandgap

Ngoc Minh Le, Ba Cuong Hoang, and Byung-Teak Lee^†

Photonic and Electronic Thin Film Laboratory, Department of Materials Science and Engineering, Chonnam National University, 300 Yong-bong dong, Gwangju 61186, Republic of Korea

E-mail:

ZnMgBeGaO/Ag/ZnMgBeGaO multilayer structures were sputter grown and characterized in detail. Results indicated that the electrical properties of the ZnMgBeGaO films were significantly improved by inserting an Ag layer with proper thickness (~ 10 nm). Structures with thicker Ag films showed much lower optical transmission, although the electrical conductivity was further improved. It was also observed that the electrical properties of the multilayer structure were sizably improved by annealing in vacuum (~35% at 300 °C). The optimum ZnMgBeGaO(20nm)/Ag(10nm)/ZnMgBeGaO(20nm) structure exhibited an electrical resistivity of ~2.6 × 10-5 Ωcm (after annealing), energy bandgap of ~3.75 eV, and optical transmittance of 65%~ 95 % over the visible wavelength range, representing a significant improvement in characteristics versus previously reported transparent conductive materials.

Keywords:ZnO;transparent conducting oxides;UV wavelength;multilayer

[References]

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Cohen DJ, Ruthe KC, Barnett SA, J. Appl. Phys., 96, 459 (2004)
Matsubara K, Tampo H, Shibata H, Yamada A, Fons P, Iwata K, Niki S, Appl. Phys. Lett., 85, 1374 (2004)
Park JH, Cuong HB, Jeong SH, Lee BT, J. Alloy. Compd., 615, 126 (2014)
Yang C, Li XM, Gu YF, Yu WD, Gao XD, Zhang YW, Appl. Phys. Lett., 93, 112114 (2008)
Cuong HB, Lee CS, Lee BT, Thin Solid Films, 573, 95 (2014)
Sharma V, Kumar P, Kumar A, Surbhi, Asokan K, Sachdev K, Sol. Energy Mater. Sol. Cells, 169, 122 (2017)
Bingel A, Stenzel O, Naujok P, Muller R, Shestaeva S Steglich M, Schulz U, Kaiser N, Tunnermann A, Opt. Mater. Express, 6, 3217 (2016)
Park YS, Kim HK, Kim SW, J. Electrochem. Soc., 157, 301 (2010)
Le NM, Lee BT, ACS Appl. Mater. Interfaces, 9, 32316 (2017)
Jeong JA, Kim HK, Sol. Energy Mater. Sol. Cells, 93(10), 1801 (2009)
Kim JH, Lee HK, Na JY, Kim SK, Yoo YZ, Seong TY, Ceram. Int., 41, 8059 (2015)
Han H, Theodore ND, Alford TL, J. Appl. Phys., 103, 013708 (2008)
Gong J, Dai R, Wang Z, Zang Z, Sci. Rep., 5, 9279 (2015)
Le NM, Lee BT, Ceram. Int., 42, 5258 (2016)
Sans JA, Sanchez-Royo JF, Segura A, Tobias G, Canadell E, Phys. Rev. B, 79, 195105 (2009)
Jung YS, Choi YW, Lee HC, Lee DW, Thin Solid Films, 440(1-2), 278 (2003)
Sahu DR, Chen CY, Lin SY, Huang JL, Thin Solid Films, 515(3), 932 (2006)
Guillen C, Herrero J, Thin Solid Films, 520(1), 1 (2011)

[1] Larsson F, Keller J, Edoff M, Torndahl T, Thin Solid Films, 633, 235 (2017)

[2] Yang B, Yao C, Yu Y, Li Z, Wang X, Sci. Rep., 7, 1 (2017)

[3] Ellmer K, Nat. Photonics, 6, 809 (2012)

[4] Cohen DJ, Ruthe KC, Barnett SA, J. Appl. Phys., 96, 459 (2004)

[5] Matsubara K, Tampo H, Shibata H, Yamada A, Fons P, Iwata K, Niki S, Appl. Phys. Lett., 85, 1374 (2004)

[6] Park JH, Cuong HB, Jeong SH, Lee BT, J. Alloy. Compd., 615, 126 (2014)

[7] Yang C, Li XM, Gu YF, Yu WD, Gao XD, Zhang YW, Appl. Phys. Lett., 93, 112114 (2008)

[8] Cuong HB, Lee CS, Lee BT, Thin Solid Films, 573, 95 (2014)

[9] Sharma V, Kumar P, Kumar A, Surbhi, Asokan K, Sachdev K, Sol. Energy Mater. Sol. Cells, 169, 122 (2017)

[10] Bingel A, Stenzel O, Naujok P, Muller R, Shestaeva S Steglich M, Schulz U, Kaiser N, Tunnermann A, Opt. Mater. Express, 6, 3217 (2016)

[11] Park YS, Kim HK, Kim SW, J. Electrochem. Soc., 157, 301 (2010)

[12] Le NM, Lee BT, ACS Appl. Mater. Interfaces, 9, 32316 (2017)

[13] Jeong JA, Kim HK, Sol. Energy Mater. Sol. Cells, 93(10), 1801 (2009)

[14] Kim JH, Lee HK, Na JY, Kim SK, Yoo YZ, Seong TY, Ceram. Int., 41, 8059 (2015)

[15] Han H, Theodore ND, Alford TL, J. Appl. Phys., 103, 013708 (2008)

[16] Gong J, Dai R, Wang Z, Zang Z, Sci. Rep., 5, 9279 (2015)

[17] Le NM, Lee BT, Ceram. Int., 42, 5258 (2016)

[18] Sans JA, Sanchez-Royo JF, Segura A, Tobias G, Canadell E, Phys. Rev. B, 79, 195105 (2009)

[19] Jung YS, Choi YW, Lee HC, Lee DW, Thin Solid Films, 440(1-2), 278 (2003)

[20] Sahu DR, Chen CY, Lin SY, Huang JL, Thin Solid Films, 515(3), 932 (2006)

[21] Guillen C, Herrero J, Thin Solid Films, 520(1), 1 (2011)