Iron oxide-silica composite was synthesized using atmospheric microwave plasma and DC thermal plasma. There has recently been increasing interest in predicting the final product during vapor phase synthesis using plasma because of difficulty obtaining desirable product. In this study, vapor phase synthesis of iron oxide-silica composite from iron pentacarbonyl (Fe(CO)(5)) and tetraethyl orthosilicate (SiC8H20O4, TEOS) was conducted using various Fe/Si ratios and different types of plasma to identify the formation mechanism in the Fe-Si-O multi-component system. The morphologies and phase compositions of the synthesized particles were analyzed and compared. The results showed that the Fe/Si ratio and the type of plasma influenced the morphologies and the phase composition. A thermodynamic consideration was introduced to investigate the particle formation phenomena, which could explain the differences induced by varying the Fe/Si ratio and type of plasma. The particle formation mechanism was divided into a condensation step and a diffusion step. At the condensation step, the Fe/Si ratio determined the condensation temperature, which is related to the morphology. At the diffusion step, the quenching rate of the plasma determined the degree of diffusion, which was related to the phase composition and formation of the external layer. (C) 2017 The Society of Powder Technology Japan. Published by Elsevier B.V. and The Society of Powder Technology Japan. All rights reserved.