In this study, we synthesized multicomponent solid films of low-dose doxorubicin (DOX)-loaded poly-dimethylsiloxane (PDMS)-SiO2/CaP nanocomposites via sol-gel process combined with the method of evaporation-induced self-assembly (EISA) at low temperature. Nanomechanical properties (elasticity and adhesion) of the synthesized multicomponent films were determined by using atomic force microscopy with a PeakForce (TM) quantitative nanomechanical mapping imaging technique. Solid state of DOX in the synthesized films was studied by using UV-vis and fluorescence spectroscopy. The release profile of different concentrations of DOX loaded (1, 3, and 5 wt%) on the multicomponent films was assessed using USP Apparatus 4 and via UV-vis end analysis. Results indicate drug-component interactions on the overall morphology of domains (size and shape), nanomechanical properties, and release behavior of the DOX-loaded nanocomposites. We observed a progressive increase in surface roughness and mean adhesive value with increasing concentration of DOX loaded (0-5 wt%). In addition, for all the different concentrations of DOX-loaded, we observed a diffusion-controlled drug release. (C) 2017 Elsevier B.V. All rights reserved.