Herein, we report a modified vapor-assisted deposition method to fabricate CH3NH3PbI3 film at 70 degrees C in a vacuum drying oven. The modified method has excellent operability and expandability in preparing perovskite solar cells. The CH3NH3I treatment temperature is 130 degrees C or 150 degrees C in conventional method, but we reduced the temperature to 70 degrees C in the modified vapor-assisted method. Meanwhile, the quality of CH3NH3PbI3 films prepared via the modified method is superior to that of CH3NH3PbI3 films of solution-processed method. (C) 2017 Elsevier B.V. All rights reserved.