Titanium-loaded ionic liquid based nano-organosilica (Ti@IL-NOS) as a novel material was synthesized and characterized using low-angle XRD, diffuse reflectance spectroscopy (DRS), Fourier transformed infrared spectroscopy (FTIR), thermal gravimetric analysis (TGA), field emission scanning electron microscopy (FESEM), energy dispersive spectroscopy (EDS) and EDS mapping. Dielectric constant, band gap and breakdown field of Ti@IL-NOS were obtained to be 21.9, 3.5 eV and 0.91 V/nm, respectively. In addition, the thermal stability of this material was investigated and found to be reasonably good. However, further investigation and optimization is required to suggest such metal-loaded ionic liquid-based nano-organosilica as possible low leakage transistor gate material for the fabrication of low-dimension electronic devices. Furthermore, metals such as Zr and Hf may be suggested as metal constituent of such nano-organosilica. (C) 2017 The Society of Powder Technology Japan. Published by Elsevier B.V. and The Society of Powder Technology Japan. All rights reserved.