The wear resistance of Ti1-xMexN (Me = Zr, Al, Cr) coatings by the laser carburization process was investigated in terms of local atomic structural changes. The repeated pulsed laser ablation was performed to the Ti1-xMexN coating surfaces after Graphite paste was covered. The friction coefficients of the coating specimens were decreased from similar to 0.7 to 0.2, and the formation of cracks and debris was suppressed by implementing the laser ablation process. ToF-SIMS depth profiles showed that the laser carburization helps Carbon penetrate into the coating layer as deep as similar to 20 nm below its surface. XPS and XAFS analyses revealed that the improvement of the wear resistance of the coatings was achieved not by formation of TiC or ZrC lattices on the coatings surfaces but by Carbon interstitials to the Ti1-xMexN lattices. (C) 2018 Elsevier B.V. All rights reserved.