F content in SnO2 powder was adjusted using fluorine gas (F-2 gas). From XPS and XRD results of fluorinated SnO2 particles, it proved that the particle surface could be fluorinated without change of crystal structure. Compared with untreated SnO2, the fluorinated SnO2 led to improved dispersion stability. In addition, the surface fluorination of SnO2 particles could improve the electrical conductivity (approximately 75 Sm-1) under a fluorine pressure of 66.7 kPa at 200 degrees C for 1 h.