In the current study, yttrium iron garnet films incorporated with cerium with the general formula of CexY3-xFe5O12 and values of (x = 0, 0.1, 0.3, 0.5, 0.7) were prepared through sol-gel method using spin coating technique and heating treatment on quartz substrates. Prepared samples were studied to check physical characteristics. X-ray diffraction analysis (XRD), scanning electron microscope (SEM), atomic force microscope (AFM) and vibrating sample magnetometer (VSM) were applied to study the impact of Ce impurities on the structural characteristic, surface morphology of films and magnetic properties, respectively. Faraday rotation values of samples were measured at the wavelength of 632 nm. The image of the atomic force microscope (AFM) of the prepared samples shows that the films have a continuous and smooth surface.