Partially fluorinated oxo-alkoxide tungsten complexes bearing beta-diketonate or ketoesterate ligands have been synthesized and their thermal and physical properties have been evaluated for Aerosol Assisted Chemical Vapor Deposition (AACVD) of WOx. Volatility and thermal stability of the complexes have been shown to depend on the bidentate ligand and the degree of fluorination of the alkoxides. Growth of tungsten oxide from the precursor WO(OC(CH3)(2)CF3)(3)(tbac) (tbac = tert-butyl acetoacetate) has been demonstrated. Deposits grown at temperatures from 150 to 300 degrees C are amorphous thin films of substoichiometric WOx. Deposition at temperatures from 350 to 500 degrees C produced either polycrystalline films or crystalline nanorods of W18O49.