The surface of poly(p-phenylene terephthalamide) (PPTA) films was modified by oxygen plasma, and the modified film surface was analyzed by an advancing contact meter and X-ray photoelectron spectroscopy (XPS). The advancing contact measurement showed that the oxygen plasma treatment made the surface of the PPTA film hydrophilic. The XPS analyses also showed the increase in the O/C and N/C atom ratio, especially the O/C atom ratio, at the PPTA film surface by the oxygen plasma treatment. A main oxygen functionality formed by the oxygen plasma treatment is a carboxylic acid group, and a main nitrogen functionality formed is a protonated amino group. The formation of the oxygen and nitrogen functionalities formed by the oxygen plasma treatment is not restricted to the surface of the PPTA film, but penetrates at least 35 Angstrom deep from the film surface. The formation of these carboxylic acid and protonated amino groups is a result of the bond scission of the amide linkages in the PPTA film. Interactions of photons in the oxygen plasma rather than interactions of electrons and activated oxygen atoms contribute greatly to the bond scission.