CBD grown CdS thin films were implanted using 45 keV N5+ ions of different fluences from 1 x 10(15) to 5 x 10(16) ions/cm(2) by electron cyclotron resonance (ECR) ion source. Structural properties of pristine and ion beam implanted films were studied by glancing angle X-ray diffraction (GAXRD) and it becomes a hexagonal structure of polycrystalline thin films. High resolution scanning electron microscopy (HRSEM) studies shows that the pristine sample forms agglomerated particles of CdS. After ion implantation of higher fluence 5 x 10(16) ions/cm(2), numerous defects created spikes on the surface of the film. The spike formation explained with the help of nuclear elastic collisions. The optical band gap energy of N5+ ion implanted thin films was reduced with increases of ion fluences. This is probably due to lattice disorder produced band-tailing and/or creation of impurity states. The red, yellow, green and band edge emissions were studied in correspondence with photoluminescence spectrum. (C) 2018 Elsevier B. V. All rights reserved.