ZnO nanosheets were synthesized directly onto the sensing measurement element by introducing an Al nano-interlayer. The morphology, structure, element content, and surface defects of the prepared ZnO nanosheets were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), transmission electron microscopic (TEM), energy-dispersive spectroscopy (EDS), and X-ray photoelectron spectroscopy (XPS). The ZnO nanosheets possess ultrathin thickness of about 15 nm and abundant intrinsic defects. Al elements were observed in the ZnO nanosheets and the predominantly exposed planes of the ZnO nanosheets were perpendicular to [121] crystal orientation. The sensor based on the Al-doped ZnO ultrathin nanosheets showed excellent ethanol sensing properties, including high response, fast response/recovery, good selectivity, long-term stability and well repeatability. The excellent sensing properties of the ZnO nanosheets are attributed to their large specific surface area, the doping of Al elements, abundant intrinsic defects and high surface energy of the exposed planes. (C) 2018 Elsevier B.V. All rights reserved.