In this study, we fabricated the ITO-stacked AgNWs films on the various substrates and investigated their electrical, structural, and mechanical properties. Firstly, we coated Ag nanowires (AgNWs) layer on the soda-lime glass substrate and polymer substrate such as polyestersulfone (PES) and polycarbonate (PC) by using modified spin-coating method. And then, Indium Tin Oxide (ITO) film was deposited on coated-AgNWs layer by using facing targets magnetron sputtering (FTS) method at the room temperature. All samples prepared on various substrates have transmittance of about 80% in the visible range (300-800nm) and low resistance of under 10ohm/sq. And we investigated the properties of ITO-stacked AgNWs prepared on flexible substrate (PES, PC) by Lab-made bending machine. After substrate bending of 1000times, the sheet resistance of prepared ITO single film 33.9 increased over 20000ohm/sq and the sheet resistance of ITO-stacked AgNWs films increased from 8.38 to 19.33ohm/sq in PES substrate and 6.69 to 24.42ohm/sq in PC substrate.