In this study, we investigate the possibility of using Ni-based anodes as alternatives to the Pt-based anodes for thin-film solid oxide fuel cells (SOFCs) operating at low temperatures. Anodes, electrolytes, and cathodes are sequentially sputtered onto a nanoporous substrate. The pure Ni anodes with modified nanostructures exhibit comparable performance as that of the optimized Pt anodes. Furthermore, a NilNi-YSZ bilayer anode fabricated via a co-sputtering method exhibits approximately 37% higher peak power density than does the optimized Pt anode at 500 degrees C, demonstrating that noble metal anodes can be replaced by Ni-based anodes in low-temperature SOFCs by optimizing the anode nanostructure. (C) 2018 Elsevier Ltd. All rights reserved.