It is important to improve the efficiency of solar cells textured by the MACE method, and the surface morphology has a significant effect on the efficiency. In this paper, we textured multicrystalline wafer using MACE method, and the surface morphology was further modified by post-etching process to achieve high efficiency. The influence of structure on diffusion and surface passivation was studied. It reveals that surface structure has a big effect on diffusion and passivation, thus affecting the efficiency. Structure with large aspect ratio results in heavily doped regions and poor passivation performance. Finally, large area solar cells with the efficiency of 19.08% and 19.11% were obtained on slurry wire and diamond wire saw multicrystalline wafer respectively, which is 0.5% and 0.8% absolutely higher than the cells with traditional acid texturing.