화학공학소재연구정보센터
Thin Solid Films, Vol.662, 137-144, 2018
The effect of low titanium content on the phase composition, structure, and mechanical properties of magnetron sputtered WB2-TiB2 films
The effect of the low Ti content on the phase composition, structure and mechanical properties of magnetron sputtered WB2-TiB2 films was studied. Non-equilibrium conditions during the films deposition cause the difference of their phase composition from the composition of the target. Sputtering of a WB2 target (hexagonal crystal lattice) results in formation of the beta-WB phase with an orthorhombic crystal lattice and a B/W atoms ratio of about 1.19. It was found that even a very low Ti content (about 0.6 at %) act as a catalyst for the formation of a diboride phase with hexagonal crystal lattice. A nano-composite beta-(W,TOBATi,W)B-2 (where (Ti,W)B-2 has a hexagonal crystal lattice) is formed in the range of 0.6 < x < 4.6 at % of Ti. At x = 10.2 at % a nano-composite based on the (Ti,W)B-2 phase is formed, which results in the highest hardness (33 GPa).