We investigated the effect of repetitive switching of polarization on the ferroelectric Pt/Pb(Zr0.52Ti0.48 )O-3/Pt thin film capacitor by using impedance spectroscopy. From the Cole-Cole plot, the equivalent circuit is described as a combination of the bulk part (a capacitor), the interface part (the constant phase element (CPE), and a parallelly-connected resistor). The circuit parameters were analyzed at various stages of switching. An early increase and a subsequent decrease of the bulk capacitance may represent the wake-up and fatigue phenomena, respectively. The change in the interface part was characterized by an increase in resistance and the growth of n, the exponent of CPE, which may have come from a reduction of defects and the diminished inhomogeneity in the interfacial layer, respectively. The change in the resistance and the coefficient of the CPE in the interface part collectively resulted in an increase in the interfacial impedance. The coercive voltage, which may have intrinsically increased due to the repetitive switching, was even larger as a result of the increased interfacial impedance.