화학공학소재연구정보센터
Journal of Crystal Growth, Vol.507, 357-361, 2019
Advantage of heteroepitaxial GaSb thin-film buffer and GaSb dot nucleation layer for GaSb/AlGaSb multiple quantum well structure grown on Si(100) substrate by molecular beam epitaxy
We grew a GaSb/Al0.3Ga0.7Sb multiple-quantum-well (MQW) structure on a two-inch Si(1 0 0) substrate using a 100-nm-thick heteroepitaxial GaSb thin-film buffer with a nucleation layer of GaSb dots by molecular beam epitaxy (MBE) and evaluated the surface morphology and the photoluminescence (PL) and X-ray diffraction spectra of the MQW structure. The full width at half maximum of the PL spectrum of the GaSb/Al0.3Ga0.7Sb MQW structure was very narrow, although the buffer thickness was much lower than those for previously reported GaSb-based QW structures on Si(1 0 0) substrates. This indicated that the surface of the 100-nm-thick GaSb thin-film buffer was sufficiently flat to form heterostructures and MQWs. The surface roughness and crystalline quality of the GaSb buffer and MQW structure were strongly dependent on the growth temperature; high-performance devices were realized by optimizing the growth temperature. These results showed the advantage and potential applicability of the GaSb/Al0.3Ga0.7Sb MQW structure and the GaSb thin-film buffer with GaSb dots as a nucleation layer grown on Si(1 0 0) substrates.