화학공학소재연구정보센터
Journal of the American Ceramic Society, Vol.102, No.2, 569-577, 2019
Effects of ceramic types on evolution of micrometer-sized features during sintering
In this work, ZnO and ZrO2 ridges with 2 mu m size are created based on a centrifuge-aided micromolding approach and then sintered with different time. Characterization of feature morphology, fidelity, grain size, relative density, and linear shrinkage has been conducted. The densification mechanisms for both ZnO and ZrO2 are controlled by grain-boundary diffusion, but their grain growth mechanisms are dominated by gas diffusion and surface diffusion respectively. The sintering behavior for the bulk can be described with a N-g/N-b factor at 36, while for the features, a smaller N-g/N-b factor (15 for ZnO and 8 for ZrO2) is needed. Attributed to their sintering mechanism difference, the grains in the ZnO features have a faster growth rate than those in the bulk, while the grains in the ZrO2 features have a similar growth rate to those in the bulk. ZnO has a much faster grain growth behavior, leading to ridge fidelity loss and severe ridge destruction, while ZrO2 has a much slower grain growth rate, resulting in high ridge fidelity and strong resistance to ridge destruction.