화학공학소재연구정보센터
Solid-State Electronics, Vol.152, 4-10, 2019
Two-step degradation of a-InGaZnO thin film transistors under DC bias stress
A unified explanation is proposed to consistently explain the two-step degradation of amorphous InGaZnO (a-IGZO) thin film transistors (TFTs) under DC positive bias temperature instability (PBTI) stress without or with different drain stress voltages (V-ds). For PBTI stress without stress V-ds , this initial negative Vth shift is believed to be induced by donor-like defect states corresponding to H2O molecule and intrinsic defects, while for PBTI stress with stress V-ds, the negative shift is believed to be induced by donor-like defect states corresponding to oxygen vacancies. The gate-bias-induced electron trapping mechanism is responsible for positive Vth shift. These transitions from negative to positive Vth shift are resulted from the competition between the donor-like states creation and electron trapping.