Nanopowders and coatings of pure and Cu-doped ZnO were prepared by the pulsed electron beam evaporation method. The results of X-ray diffraction demonstrated that all samples have a single-phase ZnO hexagonal wurtzite type structure. The SEM images highlighted that pure and Cu-doped ZnO samples have bimodal nanoparticle shapes with an average particle size of 40 nm-5 mu m. The magnetic hysteresis loop of pure ZnO nanoparticles at room temperature revealed a saturation magnetization of 0.044 emu/g in a vacuum and 0.027emu/g in air. The hysteresis loops of Zn0.9978Cu0.0022O and Zn0.9965Cu0.0035O samples indicated similar magnetic properties with the saturation magnetization of 0.037 and 0.012 emu/g and coercivity of about zero and similar to 100 Oe, respectively. The correlation between the concentration of structural defects (oxygen vacancies) and the ferromagnetic behavior of nanopowders are presented. The dependences of the integral intensity of the green and the orange bands of photoluminescence spectra and the magnetization on the copperdoping level are considered and their correlation is established.