In this study, thin-film Pt catalysts with ultra-low metal loadings (ranging from 1 to 200 mu g cm(-2)) were prepared by magnetron sputtering onto various carbon-based substrates. Performance of these catalysts acting as anode, cathode, or both electrodes in a proton exchange membrane fuel cell (PEMFC) was investigated in H-2/O-2 and H-2/air mode. As base substrates we used standard microporous layers comprising carbon nanoparticles with polytetrafluoroethylene (PTFE) or fluorinated ethylene propylene (FEP) supported on a gas diffusion layer. Some substrates were further modified by magnetron sputtering of carbon in N-2 atmosphere (leading to CNx) followed by simultaneous plasma etching and cerium oxide deposition. The CNx structure exhibits higher resistance to electrochemical etching as compared to pure carbon as was determined by mass spectrometry analysis of PEMFC exhaust at different cell potentials for both sides of PEMFC. The role of platinum content and membrane thickness was investigated with the above four different combinations of ionomer-free carbon-based substrates. The results were compared with a series of benchmark electrodes made from commercially available state-of-the-art Pt/C catalysts. It was demonstrated that the platinum utilization in PEMFC with magnetron sputtered thin-film Pt electrodes can be up to 2 orders of magnitude higher than with the standard Pt/C catalysts while keeping the similar power efficiency and long-term stability. (C) 2019 Hydrogen Energy Publications LLC. Published by Elsevier Ltd. All rights reserved.