Controlling the texture of a nanostructured thin film is an important issue for numerous applications. Although the texture formation of thin films grown by oblique angle deposition has been investigated for a large number of materials, a general trend is missing so far. Thus, the texture formation must be evaluated on a case-by-case basis. In the present study, Molybdenum thin films consisting of separated tilted columns are fabricated by electron beam evaporation at a highly oblique deposition geometry at room temperature on natively and thermally oxidized Si(100) substrates. The film thickness is varied between 10 nm and 2.5 mu m. The film morphology is investigated by scanning electron microscopy. Various transmission electron microscope (TEM) measurements on individual Molybdenum columns reveal a single crystalline structure of those columns. It is discussed why the tilt angle of the Molybdenum columns is not equal to the tilt angle of the crystals' [110] direction. Reflection high-energy electron diffraction, X-ray diffraction in-plane pole figure measurements and cross-sectional TEM specimen are used to further investigate the crystallinity as well as the texture evolution of the Molybdenum thin films depending on the film thickness. The texture changes with increasing film thickness from arbitrarily oriented crystallites to a biaxially textured thin film with a minor fiber texture contribution. The selection of crystal orientations with increasing film thickness is discussed with view to the evolutionary selection process among the growing columns.