Ab initio (MP2/6-31G*) and density functional theory (B3LYP/6-31G*) calculations were performed to check the feasibility for the fragmentation of 1,3,2-dioxasila-5-cycloheptene-2-diyl to form SiO2. According to the theoretical results the reaction is not synchronous but concerted and endergonic and requires an energy of activation of about 50-60 kcal mol(-1). Semiempirical calculations (PM3) indicate that the process should be favored as a chemical vapor deposition process at the growing surface of quartz. For the experimental realization of the fragmentation reaction the corresponding diazido silanes were chosen as silylene precursors. Two different strategies for the synthesis of 4,4’,7,7’-tetramethyl-2,2-diazido-1.3.2-dioxasila-5-cycloheptene are presented. Unlike the 4,7-dimethyl- and the unsubstituted system the tetramethyl derivative is stable toward polymerization. It decomposes under Bash vacuum pyrolysis conditions at 650 degrees C and can be used for the chemical vapor deposition of amorphous quartz.