Manganese-doped zinc silicate phosphor particles were prepared by spray pyrolysis using FEAG (Filter Expansion Aerosol Generator) process. The characteristics of cathodoluminescence, crystallinity, and morphology of Zn2SiO4:Mn particles were investigated. The as-prepared and calcined particles were spherical shape and 1 micrometer in diameter, and aggregation between particles was not observed even after calcination at high temperature. The particles prepared at 600 degrees C had amorphous phase, and zinc oxide peaks appeared at 700 degrees C. The peaks of the beta-Zn2SiO4 with orthorhombic structure was obtained at 1000 degrees C. Pure phase willemite structure was obtained after calcination at 1200 degrees C for 5 h when adding the 80-90% of stoichiometric amount of zinc nitrate. The maximum cathodoluminescence (CL) intensity of particles was obtained at 1.3 mol% doping concentration of Mn. The particles calcined at 1200 degrees C for 5 h has the maximum CL intensity of 198 cd/m(2).