Infrared surface spectroscopic techniques commonly have long-term issues that (1) the multiple reflections of light in the substrate yield optical interference fringes in the absorption spectrum and (2) the double modulation of light at the interferometer in a Fourier transform infrared spectrometer makes the water-vapor subtraction impossible. These measurement troubles often disturb the quantitative analysis of chemical bands of the analyte thin film. Multiple-angle incidence resolution spectrometry (MAIRS) is not an exception in this matter, either. In the present study, the long-term common issues have first been resolved by fixing the angle of incidence at a large angle, whereas the polarization angle is changed. With this simple conceptual change of MAIRS, as a result, we are ready for concentrating on spectral analysis only without concerning about the measurement troubles.