화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.140, No.12, L183-L184, 1993
Maskless Texture Etching of GaAs
Chemical etches to produce a low-reflectance textured surface on GaAs surfaces were investigated. The Caros etch at 1.3 degrees C produced a fine (20 nm) random surface texture on GaAs. Reduced optical reflectivity was seen, with the greatest reduction occurring at short wavelength.