Journal of the Electrochemical Society, Vol.141, No.2, 585-592, 1994
A Mathematical-Model for Planarization of Microelectronic Topographies
A model has been developed to predict free surface profiles over topographic features for nonvolatile fluids. The degree of planarity of the free surface is shown to depend on two geometric ratios and the relative magnitude of centrifugal and surface tension forces. Previous models have used a lubrication model to approximate the flow field. One purpose of this work is to make a comparison between the full two-dimensional model and a one-dimensional lubrication model. The lubrication model compares favorably to the 2D model for large features. For small features, there is a difference between the free surface predictions of the two models, which depend on the geometric ratios.