화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.141, No.3, 689-690, 1994
Electrical Charge and HF Concentration-Effect on Porous Silicon Formation
Porous silicon (PS) samples fabricated using different electrochemical conditions are studied. A correlation between film porosity and the energy E, provided to the silicon/HF system, is found. The dependence of the etched mass on E is also investigated. A maximum for the porosity is found to exist. The conditions for fabricating PS samples emitting in the visible region are given.