Previous Article Next Article Table of Contents Journal of the Electrochemical Society, Vol.141, No.11, 3290-3290, 1994 Export Citation Effects of Deposition and Ion-Scattering on Profile Control in Submicron Oxide Etch (Vol 141, Pg 2904, 1994) Shan H, Srinivasan BK, Jillie DW, Multani JS, Lo WJ Please enable JavaScript to view the comments powered by Disqus.
