The resistance of silane-based monolayers was investigated under polymerase chain reaction (PCR) thermal conditions. The monolayers of (3-glycidyloxypropyl)trimethoxysilane (GPTMS) were fabricated on a SiO2 surface and 4-ethynyl-alpha,alpha,alpha-trifluorotoluene (ETFT) was immobilized on the GPTMS layer via a click reaction. X-ray photoelectron spectroscopy was carried out to evaluate F1s signal intensities of ETFT before and after incubation under PCR thermal conditions. It was found that similar to 80% of the silane remained on the substrate.