Alkanethiolate films were used as templates for patterned electrodeposition of metal structures with micrometer dimensions. Two patterning schemes were implemented, contact printing of a C16H33SH film and mechanical scribing micrometer wide grooves in a self-assembled C16H33SH monolayer film. A thin film of nickel was then electrodeposited on film-free areas of the copper and gold substrates. The alkanethiolate template can also be used as a mask for chemical etching. This was demonstrated by etching C16H33SH patterned copper substrates. More complex structures can be built by combining both deposition and etching processes.