화학공학소재연구정보센터
Journal of Physical Chemistry A, Vol.124, No.13, 2708-2713, 2020
Distortion Correction for an Imaging Ellipsometer
A simple imaging add-on utilizing the combination of a relay lens and an optical grating to a nulling ellipsometer for the purpose of imaging and correcting angular distortion is designed, built, and tested. Image contrast is achieved on a standardized silicon wafer, graphene transferred on silicon wafer, a self-assembled monolayer of 1-octadecanethiol on gold, and a 1:1 mixture of dilauroylphosphatidylcholine / distearoylphosphatidylcholine (DLPC/DSPC) on copper. The configuration used in this paper corrects the angular distortion and depth of focus with a spatial resolution of 4.38 mu m in the laser's incident direction and 7.81 mu m in the direction that is perpendicular to the incident plane together with 3 angstrom of normal resolution while still maintaining a large field of view of at least 720 mu m x 550 mu m in focus without executing any line scanning, post-image reconstruction, or specially customized objective method. Better resolution is possibly attained with higher NA optics.