화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.143, No.3, 1014-1020, 1996
Ohmic Contacts Formed on N-Gosb by Electrochemical Deposition
Thin Ag, Au, Ni, and Pd films have been plated on n-GaSb by electrochemical deposition. The as-deposited structures have been examined by microscopy, surface profiling, and x-ray diffraction methods. Further examinations have been made after rapid thermal anneals to show the interactions of the metals with the GaSb and the development of ohmic contacts of low resistivities.