N형 양면 수광 태양전지를 위한 레이저 공정의 후면 패시베이션 적층 구조 영향성

김기륜; 장효식; Kiryun Kim; Hyo Sik Chang

Korean Journal of Materials Research, Vol.30, No.5, 262-266, May, 2020

DOI10.3740/MRSK.2020.30.5.262 Export Citation

N형 양면 수광 태양전지를 위한 레이저 공정의 후면 패시베이션 적층 구조 영향성

Effect of Laser Ablation on Rear Passivation Stack for N-type Bifacial Solar Cell Application

김기륜, 장효식^†

충남대학교 에너지기술과학 대학원

Kiryun Kim, and Hyo Sik Chang^†

Graduate School of Energy Science and Technology, Chungnam National University, Daejeon 34134, Republic of Korea

E-mail:

In this paper, we investigated the effect of the passivation stack with Al2O3, hydrogenated silicon nitride (SiNx:H) stack and Al2O3, silicon oxynitride (SiONx) stack in the n type bifacial solar cell on monocrystalline silicon. SiNx:H and SiONx films were deposited by plasma enhanced chemical vapor deposition on the Al2O3 thin film deposited by thermal atomic layer deposition. We focus on passivation properties of the two stack structure after laser ablation process in order to improve bifaciality of the cell. Our results showed SiNx:H with Al2O3 stack is 10 mV higher in implied open circuit voltage and 60 μs higher in minority carrier lifetime than SiONx with Al2O3 stack at Ni silicide formation temperature for 1.8% open area ratio. This can be explained by hydrogen passivation at the Al2O3/Si interface and Al2O3 layer of laser damaged area during annealing.

Keywords:bifacial solar cell;passivation effect;laser ablation;atomic layer deposition;n type Si

[References]

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Cho KH, Cho YJ, Chang HS, Kim KJ, Song HE, J. Korean Phys. Soc., 67, 995 (2015)
Cho KH, Cho YJ, Chang HS, J. Koran Ceram. Soc., 51, 197 (2014)
Jeong MS, Choi SJ, Chang HS, Lee JI, Kang MG, Kim DH, Song HE, Jpn. J. Appl. Phys., 55 (2016)
Kim GM, Cho YJ, Chang HS, Korean J. Mater. Res., 29(4), 228 (2019)
Schmidt J, Merkle A, Brendel R, Hoex B, van de Sanden MCM, Kessels WMM, Prog. Photovoltaics, 16, 461 (2008)
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Zhao FF, Zheng JZ, Shen ZX, Osipowicz T, Gao WZ, Chan LH, Microelectron. Eng., 71, 104 (2004)
Dupuis J, Fourmond E, Lelievre JF, Ballutaud D, Lemiti M, Thin Solid Films, 516(20), 6954 (2008)
Alayo MI, Pereyra I, Scopel WL, Fantini MCA, Thin Solid Films, 402(1-2), 154 (2002)

[1] Rudiger M, Fischer S, Frank J, Ivaturi A, Richards BS, Kramer KW, Hermle M, Goldschmidt JC, Sol. Energy Mater. Sol. Cells, 128, 57 (2014)

[2] Zhang C, Shen H, Sun L, Yang J, Wu S, Lu W, Energies, 13, 1388 (2020)

[3] Raghuwanshi M, Laterne A, Perchec JL, Pareige P, Cadel E, Gall S, Duguay S, Prog. Photovoltaics, 23, 1724 (2015)

[4] Dysch D, Mette A, Filipovic A, Glunz SW, Prog. Photovoltaics, 17, 101 (2009)

[5] Mulligan WP, Rose DH, Cudzinovic MJ, DMD, Mulligan WP, Rose DH, Cudzinovic MJ, Ceuster DMD, Mcintosh KR, Smith DD, Swanson RM, in Proc., 19th EPVSEC, p.387 (2004).

[6] Hubner A, Aberle AG, Hezel T, Appl. Phys. Lett., 70, 1008 (1997)

[7] Hezel R, Prog. Photovoltaics, 11, 549 (2003)

[8] Cho KH, Cho YJ, Chang HS, Kim KJ, Song HE, J. Korean Phys. Soc., 67, 995 (2015)

[9] Cho KH, Cho YJ, Chang HS, J. Koran Ceram. Soc., 51, 197 (2014)

[10] Jeong MS, Choi SJ, Chang HS, Lee JI, Kang MG, Kim DH, Song HE, Jpn. J. Appl. Phys., 55 (2016)

[11] Kim GM, Cho YJ, Chang HS, Korean J. Mater. Res., 29(4), 228 (2019)

[12] Schmidt J, Merkle A, Brendel R, Hoex B, van de Sanden MCM, Kessels WMM, Prog. Photovoltaics, 16, 461 (2008)

[13] Jaffrennou P, Szlufcik, Proceedings of the 26th World Conference and Exhibition on Photovoltaic Solar Energy Conversion (2011).

[14] Zhao FF, Zheng JZ, Shen ZX, Osipowicz T, Gao WZ, Chan LH, Microelectron. Eng., 71, 104 (2004)

[15] Dupuis J, Fourmond E, Lelievre JF, Ballutaud D, Lemiti M, Thin Solid Films, 516(20), 6954 (2008)

[16] Alayo MI, Pereyra I, Scopel WL, Fantini MCA, Thin Solid Films, 402(1-2), 154 (2002)