- Previous Article
- Next Article
- Table of Contents
Journal of the Electrochemical Society, Vol.144, No.6, 2242-2262, 1997
Etch-Stop Techniques for Micromachining
A presentation of etch stop engineering is presented with a review of the present state of the art in etch stop micromachining. This review assumes a global definition for an etch stop and focuses on salient examples of common etch stop techniques, as well as unique and/or novel etch stop methods. A table of representative etch stops is also presented as a summary.
Keywords:CYCLOTRON-RESONANCE PLASMA;III-V-SEMICONDUCTORS;POROUS SILICON FORMATION;HETEROJUNCTION BIPOLAR-TRANSISTORS;ETHYLENE DIAMINE-PYROCATECHOL;DISSOLUTION SLOWNESS SURFACE;DIAPHRAGM PRESSURE SENSORS;HEAVILY-DOPED SILICON;P-N-JUNCTION;AQUEOUS KOH