화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.145, No.1, 329-332, 1998
Laser microwave photoconductance studies of ultraviolet-irradiated silicon wafers - Effect of metallic contamination
The minority carrier recombination lifetimes of ultraviolet-irradiated silicon wafers were studied using the laser-microwave photoconductance method. These wafers were intentionally surface contaminated with metals. With ultraviolet irradiation, the effective minority carrier recombination lifetimes of these samples are enhanced. The Lifetime enhancement occurs at a faster rate for contaminated wafers. These lifetime enhancements are not permanent; with cessation of the ultraviolet radiation, the preirradiation levels can be restored.