Recent studies of carbon oxidation by scanning tunneling microscopy indicate that measured rates of car bon oxidation can be affected by, randomly distributed defects in the carbon structure, which vary in size. Nevertheless, the impact of this observation on rite analysis or modeling of the oxidation rate has not been critically assessed. This work focuses on the stochastic analysis of the dynamics of carbon clusters＇ conversions during the oxidation of a carbon sheet. According to the classic model of Nagle and Strickland-Constable (NSC), two classes of carbon clusters are involved in three types of reactions: gasification of basal-carbon clusters, gasification of edge-carbon clusters, and conversion of the edge-carbon clusters to the basal-carbon clusters due to thermal annealing. To accommodate the dilution of basal clusters, however; the NSC model rs modified for the later stage of oxidation in this work. Master equations governing the numbers of three classes of carbon clusters, basal, edge and gasified, are formulated front stochastic population balance. The stochastic pathways of the three different classes of carbon during oxidation, that is, their means and the fluctuations around these means, have been numerically simulated independently by the algorithm derived from the master equations, as well as by an event-driven Monte Carlo algorithm. Both algorithms have given rise to identical results.