Pulverization and Densification Behavior of YAG Powder Synthesized by PVA Polymer Solution Method

Hyun-Ho Im; Sang-Jin Lee

Korean Journal of Materials Research, Vol.30, No.11, 573-580, November, 2020

DOI10.3740/MRSK.2020.30.11.573 Export Citation

Pulverization and Densification Behavior of YAG Powder Synthesized by PVA Polymer Solution Method

Hyun-Ho Im¹, and Sang-Jin Lee^{1, 2, †}

¹Department of Advanced Materials Science and Engineering, Mokpo National University, Muan 534-729, Republic of Korea
²The Research Institute of Ceramic Industry Technology, Mokpo National University, Muan 534-729, Republic of Korea

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YAG (Yttrium Aluminum Garnet, Y3Al5O12) has excellent plasma resistance and recently has been used as an alternative to Y2O3 as a chamber coating material in the semiconductor process. However, due to the presence of an impurity phase and difficulties in synthesis and densification, many studies on YAG are being conducted. In this study, YAG powder is synthesized by an organic-inorganic complex solution synthesis method using PVA polymer. The PVA solution is added to the sol in which the metal nitrate salts are dissolved, and the precursor is calcined into a porous and soft YAG powder. By controlling the molecular weight and the amount of PVA polymer, the effect on the particle size and particle shape of the synthesized YAG powder is evaluated. The sintering behavior of the YAG powder compact according to PVA type and grinding time is studied through an examination of its microstructure. Single phase YAG is synthesized at relatively low temperature of 1,000 °C and can be pulverized to sub-micron size by ball milling. In addition, sintered YAG with a relative density of about 98 % is obtained by sintering at 1,650 °C.

Keywords:YAG;PVA solution method;synthesis;sintering;microstructure

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[1] Kwon HS, Kim YJ, Park HK, Lee CH, Surf. Coat. Technol., 374, 493 (2019)

[2] Liu W, Jin LL, Wang SW, Mater. Chem. Phys., 232, 471 (2019)

[3] Na H, Park J, Choi SC, Kim HJ, Appl. Surf. Sci., 476, 663 (2019)

[4] Iwasawa J, Nishimizu R, Tokita M, Kiyohara M, Uematsu K, J. Am. Ceram. Soc., 90(8), 2327 (2007)

[5] Kim DM, Yoon SY, Kim KB, KimHS, Oh YS, Lee SM, J. Korean Ceram. Soc., 45, 707 (2008)

[6] Kim KB, Kim DM, Lee JK, Oh YS, Kim HT, Kim HS, Lee SM, J. Korean Ceram. Soc., 46, 456 (2009)

[7] Zhou J, Zhao F, Wang X, Li Z, Zhang Y, Yang I, J. Lumin., 119, 237 (2006)

[8] Jung HG, Hwang GH, Lim KY, Lee YH, Kang SG, J. Korean Powder Metall. Inst., 13, 243 (2006)

[9] Yang L, Lu T, Xu H, Wei N, J. Alloy. Compd., 484, 449 (2009)

[10] Yan XH, Zheng SS, Yu RM, Cai J, Xu ZW, Liu J, Luo XT, Trans. Nonferrous Met. Soc. China, 18, 648 (2008)

[11] Mostafa M, Ebnalwaled K, Saied HA, Roshdy R, J. Korean Ceram. Soc., 55, 581 (2018)

[12] Chen TM, Chen SC, Yu CJ, J. Solid State Chem., 144, 437 (1999)

[13] Kang YC, Lenggoro IC, Park SB, Okuyama K, Mater. Res. Bull., 35, 798 (2000)

[14] Suarez M, Fernandez A, Menendez JL, Torrecillas R, J. Alloy. Compd., 493, 391 (2010)

[15] Vaidhyanathan B, Binner JGP, J. Mater. Sci., 41(18), 5954 (2006)

[16] Zhou T, Zhang L, Li Z, Wei S, Wu J, Wang L, Yang H, Fu Z, Chen H, Tang D, Wong C, Zhang Q, Ceram. Int., 43, 3140 (2017)

[17] Liu B, You Y, Zhang H, Wu H, Jin J, Liu H, RSC Adv., 6, 110349 (2016)

[18] Kim AR, Lee SJ, J. Korean Ceram. Soc., 51, 424 (2014)

[19] Kupp ER, Kochawattama S, Lee SH, Misture S, Messing GL, J. Mater. Res., 29, 2303 (2014)

[20] Jung HG, Hwang GH, Lim KY, Lee YH, Kang SG, J. Korean Powder Metall. Inst., 13, 243 (2006)

[21] Kang YC, Chung YS, Park SB, Korean J. Chem. Eng., 38, 62 (1999)

[22] Ikesue A, Kinoshita T, Kamta K, Yoshida K, J. Am. Ceram. Soc., 78, 1033 (1995)

[23] Tong H, Wnag N, Zou Y, Zhang Z, Fan W, Shou J, Zhang X, J. Electron. Mater., 48, 374 (2018)

[24] Manalert R, Rahaman MN, J. Mater. Sci., 31(13), 3453 (1996)

[25] Kim YH, Lee SJ, J. Korean Powder Metall. Inst., 20, 37 (2013)

[26] Lee SJ, Lee JE, J. Korean Powder Metall. Inst., 18, 35 (2011)