화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Journal of Industrial and Engineering Chemistry, Vol.91, 139-148, November, 2020
DOI10.1016/j.jiec.2020.07.048  Export Citation
Chemical, optical and transport characterization of ALD modified nanoporous alumina based structures
A.L. Cuevas, M. Valle Martínez de Yuso1, L. Gelde2, A.S. González3, V. Vega4, V.M. Prida3, †, and J. Benavente2
  • Unidad de Nanotecnología, SCBI Centro, Universidad de Málaga, E-29071 Málaga, Spain
  • 1Servicios Centrales de Investigación, Universidad de Málaga, E-29071 Málaga, Spain
  • 2Departamento de Física Aplicada I, Facultad de Ciencias, Universidad de Málaga, E-29071 Málaga, Spain
  • 3Departamento de Física, Facultad de Ciencias, Universidad de Oviedo, E-33007 Oviedo, Spain
  • 4Laboratorio de Membranas Nanoporosas, Servicios Científico-Técnicos, Universidad de Oviedo, E-33006 Oviedo, Spain
E-mail:
Nanoporous alumina-based structures (NPA-bSs) obtained by anodization of aluminum in sulfuric acid medium were coated by atomic layer deposition (ALD) of a thin conformal layer of different functional oxides (Al2O3, TiO2, Fe2O3 or ZnO), leading to samples with similar geometrical parameters but different surface materials. Morphological characterization of the NPA-bSs confirms a reduction of about 35% in pore size associated to the presence of the oxides of interest, while chemical surface analysis permits the estimation of cover layer purity and thickness. Additionally, ALD functionalization also modifies optical (band-gap, refractive index and dielectric constant) according to transmittance and spectroscopic ellipsometry results for visible and near-infrared regions, as well as electrolyte diffusive transport parameters (effective fixed charge, ion transport numbers or ionic permselectivity) of the NPA-bSs, both of which are dependent on the nature of the coating layer. Therefore, the suitability of ALD technique for geometrical and functional modification of nanoporous structures is demonstrated, thus broadening the potential application of these NPA-bSs platforms to optical sensing, nanophotonics, biosensing, microfluidics or drug delivery applications.
Keywords:Nanoporous alumina;ALD coating;Spectroscopic ellipsometry;Transmittance;Ionic transport
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