Characterization and analysis of airborne solid submicrometer particles have received considerable attention. Representative collection of particles to be analyzed is a fundamental requirement. Herein we review the efficiency of particle sampling using Nuclepore filters. The available theoretical models based on different collection mechanisms: diffusion, interception, and impaction, are explored and compared. Experimentally measured values are combined to analyze the effect of the particle capturing mechanism on collection efficiency based on different parameters like filter pore size and flow face velocity. In addition, a method for experimental collection efficiency analysis combined with theoretical model ing is developed by considering the model's applicability. The diffusion model proposed by Marre fits the sampling conditions with a small most penetrating particle size (MPPS). The combined efficiency models have corrected the inappropriateness of considering particle deposition mechanisms separately. They are recommended if the assumptions are satisfied. (c) 2020 Institution of Chemical Engineers. Published by Elsevier B.V. All rights reserved.